DLC coatings prepared by hollow cathodes at moderate pressure [Elektronisk resurs]
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Baránková, Hana (författare)
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International Conference on Diamond and Carbon Materials, September 6-10, 2015, Bad Homburg, Germany.
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Bardos, Ladislav (författare)
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Silins, Kaspars 1987- (författare)
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Uppsala universitet Teknisk-naturvetenskapliga vetenskapsområdet (utgivare)
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The Plasma group (medarbetare)
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The plasma group (medarbetare)
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The Plasma group (medarbetare)
- 2015
- Engelska.
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Sammanfattning
Ämnesord
Stäng
- DLC coatings were prepared using the rf powered cylindrical and linear hollow cathodes. The deposition process is hybrid, combining both the PE CVD and PVD. A cylindrical graphite nozzle and graphite plates were used as targets. The gas mixture used in the deposition process was argon with acetylene. Compared to e.g. magnetron sputtering, the optimum content of acetylene is lower. The effect of the acetylene content in the gas mixture as well as rf power on the deposition rate and properties of the coatings are evaluated. The geometrical effect is studied, the cylindrical hollow cathode and the linear hollow cathode are compared and the transfer of the optimized process from the cylindrical into the linear hollow cathode is discussed.
Ämnesord
- Engineering and Technology (hsv)
- Materials Engineering (hsv)
- Manufacturing, Surface and Joining Technology (hsv)
- Teknik och teknologier (hsv)
- Materialteknik (hsv)
- Bearbetnings-, yt- och fogningsteknik (hsv)
- Teknisk fysik med inriktning mot nanoteknologi och funktionella material (uu)
- Engineering Science with specialization in Nanotechnology and Functional Materials (uu)
- Teknisk fysik (uu)
- Engineering Science (uu)
Indexterm och SAB-rubrik
- Hollow cathode
- Hybrid PVD and PE CVD
- Diamond-like carbon
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