Introduction to Microfabrication [Elektronisk resurs]

• Introduction to Microfabrication; Contents; Preface to the First Edition; Preface to the Second Edition; Acknowledgements; 1 Introduction; 2 Micrometrology and Materials Characterization; 3 Simulation of Microfabrication Processes; 4 Silicon; 5 Thin-Film Materials and Processes; 6 Epitaxy; 7 Advanced Thin Films; 8 Pattern Generation; 9 Optical Lithography; 10 Advanced Lithography; 11 Etching; 12 Wafer Cleaning and Surface Preparation; 13 Thermal Oxidation; 14 Diffusion; 15 Ion Implantation; 16 CMP: Chemical-Mechanical Polishing; 17 Bonding; 18 Polymer Microprocessing; 19 Glass Microprocessing. 
• 20 Anisotropic Wet Etching21 Deep Reactive Ion Etching; 22 Wafer Engineering; 23 Special Processes and Materials; 24 Serial Microprocessing; 25 Process Integration; 26 MOS Transistor Fabrication; 27 Bipolar Transistors; 28 Multilevel Metallization; 29 Surface Micromachining; 30 MEMS Process Integration; 31 Process Equipment; 32 Equipment for Hot Processes; 33 Vacuum and Plasmas; 34 CVD and Epitaxy Equipment; 35 Cleanrooms; 36 Yield and Reliability; 37 Economics of Microfabrication; 38 Moore's Law and Scaling Trends; 39 Microfabrication at Large; Appendix A Properties of Silicon. 
• Appendix B Constants and Conversion FactorsAppendix C Oxide and Nitride Thickness by Color; Index. 

• This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes:expanded sections on MEMS and microfluidic 

Ämnesord

Electronic apparatus and appliances. 

Microelectromechanical systems. 

Microfabrication. 

Genre

Electronic books.  (LCSH)

Klassifikation

TK7875.F73 2010 (LCC)

621.381 (DDC)

Pci (kssb/8 (machine generated))