Proceedings of the AVS symposium on ion implantation - new prospects for materials modification, 14 June 1978, Yorktown Heights, New York / special ed. for the proceedings: W.L. Brown.
AVS symposium on ion implantation - new prospects for materials modification1978) (Yorktown Heights
Brown, W. L.(redaktör/utgivare)
American vacuum society(medarbetare)
American institute of physics(redaktör/utgivare)
Publicerad: New York, 1978
Engelska S. 1625-1685
Serie: Journal of vacuum science & technology, 0022-5355 ; 15:5
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