Startsida
Hjälp
Sök i LIBRIS databas

     

 

Sökning: onr:20161476 > Control of Ti1-xSix...

  • Greczynski, Grzegorz (författare)

Control of Ti1-xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition [Elektronisk resurs]

  • E-artikel/E-kapitelEngelska2015

Förlag, utgivningsår, omfång ...

  • ELSEVIER SCIENCE SA2015

Nummerbeteckningar

  • LIBRIS-ID:20161476
  • http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-122787uri
  • urn:nbn:se:liu:diva-122787urn
  • 10.1016/j.surfcoat.2015.09.001doi

Kompletterande språkuppgifter

  • Språk:engelska

Ingår i deldatabas

Anmärkningar

  • <p>Funding Agencies|European Research Council (ERC) [227754]; VINN Excellence Center Functional Nanoscale Materials (FunMat) Grant [2005-02666]; Knut and Alice Wallenberg Foundation Grant [2011.0143]; Swedish Government Strategic Faculty Grant in Materials Science; Swedish Research Council (VR) Project [2014-5790, 621-2011-4417, 330-2014-6336]</p>
  • Published
  • gratis
  • Ti1-xSixN (0 less than= x less than= 0.26) thin films are grown in mixed Ar/N-2 discharges using hybrid high-power pulsed and dc magnetron co-sputtering (HIPIMS/DCMS). In the first set of experiments, the Si target is powered in HIPIMS mode and the Ti target in DCMS; the positions of the targets are then switched for the second set. In both cases, the Si concentration in co-sputtered films, deposited at T-s = 500 degrees C, is controlled by adjusting the average DCMS target power. A pulsed substrate bias of -60 V is applied in synchronous with the HIPIMS pulse. Depending on the type of pulsed metal-ion irradiation incident at the growing film, Ti+/Ti2+ vs. Si+/Si2+, completely different nanostructures are obtained. Ti+/Ti2+ irradiation during Ti-HIPIMS/Si-DCMS deposition leads to a phase-segregated nanocolumnar structure with TiN-rich grains encapsulated in a SiNz tissue phase, while Si+/Si2+ ion irradiation in the Si-HIPIMS/Ti-DCMS mode results in the formation of Ti1-xSixN solid solutions with x less than= 024. Film properties, including hardness, modulus of elasticity, and residual stress exhibit a dramatic dependence on the choice of target powered by HIPIMS. Ti-HIPIMS/Si-DCMS TiSiN nanocomposite films are superhard over a composition range of 0.04 less than= x less than= 0.26, which is significantly wider than previously reported. The hardness H of films with 0.13 less than= x less than= 0.26 is similar to 42 GPa; however, the compressive stress is also high, ranging from -6.7 to -8.5 GPa. Si-HIPIMS/Ti-DCMS films are softer at H similar to 14 GPa with 0.03 less than= x less than= 0.24, and essentially stress-free (sigma similar to 0.5 GPa). Mass spectroscopy analyses at the substrate position reveal that the doubly-to-singly ionized metal-ion flux ratio during HIPIMS pulses is 0.05 for Si and 029 for Ti due to the difference between the second ionization potentials of Si and Ti vs. the first ionization potential of the sputtering gas. The average momentum transfer to the film growth surface per deposited atom per pulse less than p(d)greater than is similar to 20 x higher during Ti-HIPIMS/Si-DCMS, which results in significantly higher adatom mean-free paths (mfps) leading, in turn, to a phase-segregated nanocolumnar structure. In contrast, relatively low less than p(d)greater than values during Si-HIPIMS/Ti-DCMS provide near-surface mixing with lower adatom mfps to form Ti1-xSixN solid solutions over a very wide composition range with x up to 0.24. Relaxed lattice constants decrease linearly, in agreement with ab-initio calculations for random Ti1-xSixN alloys, with increasing x. (C) 2015 Elsevier B.V. All rights reserved.

Ämnesord och genrebeteckningar

Biuppslag (personer, institutioner, konferenser, titlar ...)

  • Patscheider, J. (författare)
  • Lu, Jun (författare)
  • Alling, Björn (författare)
  • Ektarawong, Annop (författare)
  • Jensen, Jens (författare)
  • Petrov, Ivan (författare)
  • Greene, Joseph E (författare)
  • Hultman, Lars (författare)
  • Linköpings universitetInstitutionen för fysik, kemi och biologi (utgivare)
  • Linköpings universitetTekniska fakulteten (utgivare)

Sammanhörande titlar

  • Del av/supplement till:channel record
  • Ingår i:VärdpublikationSurface & Coatings Technology280, 174-1840257-8972

Internetlänk

Länkade data-URI:er (test)

  • 264446 (Naturvetenskap hsv)
  • 383647 (Kemi hsv)
  • 264446 (Naturvetenskap hsv)
  • 274895 (Fysik hsv)
  • 243422 (Linköpings universitet Institutionen för fysik, kemi och biologi pbl)
Inställningar Hjälp

Beståndsinformation saknas

Om LIBRIS
Sekretess
Blogg
Hjälp
Fel i posten?
Kontakt
Teknik och format
Sök utifrån
Sökrutor
Plug-ins
Bookmarklet
Anpassa
Textstorlek
Kontrast
Vyer
LIBRIS söktjänster
SwePub
Sondera
Uppsök

Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.

Copyright © LIBRIS - Nationella bibliotekssystem

 
pil uppåt Stäng

Kopiera och spara länken för att återkomma till aktuell vy